Monocrystalline-Silicon Microwave MEMS

This paper gives an overview of recent achievements in microwave micro-electrome chanical systems (microwave MEMS) at KTH Royal Institute of Technology, Stockholm, Sweden. The Ørst topic is a micromachined W-band phase shifter based on a micromachined dielectric block which is vertically moved by integrated MEMS actuators to achieve a tuning of the prop- agation constant of a micromachined transmission line. The second topic is W-band MEMS- tuneable microwave high-impedance metamaterial surfaces conceptualized for local tuning of the electromagnetic resonance properties of surface waves on a high-impedance surface. The third topic covers 3-dimensional micromachined coplanar transmission lines with integrated MEMS actuators which move the sidewalls of these transmission lines. Multi-stable switches, tuneable capacitors, tuneable couplers, and tuneable Ølters have been implemented and characterized for 1{40GHz frequencies. As a forth topic, micromachined waveguide switches are presented. Fi- nally, silicon-micromachined near-Øeld and far-Øeld sensor and antenna interfaces are shown, including a micromachined planar lens antenna and a tapered dielectric rod measurement probe for medical applications.