Particle-in-cell simulations of high frequency capacitively coupled plasmas including spatially localised inductive-like heating

Osca Engelbrecht, Michel, Ridgers, Christopher Paul orcid.org/0000-0002-4078-0887, Dedrick, James Peter orcid.org/0000-0003-4353-104X et al. (1 more author) (2023) Particle-in-cell simulations of high frequency capacitively coupled plasmas including spatially localised inductive-like heating. Plasma Sources Science and Technology. 125003. ISSN 0963-0252

Metadata

Authors/Creators:
Copyright, Publisher and Additional Information: © 2023 The Author(s)
Dates:
  • Accepted: 24 November 2023
  • Published: 7 December 2023
Institution: The University of York
Academic Units: The University of York > Faculty of Sciences (York) > Physics (York)
Depositing User: Pure (York)
Date Deposited: 18 Jan 2024 09:00
Last Modified: 14 Feb 2024 00:27
Published Version: https://doi.org/10.1088/1361-6595/ad0fb1
Status: Published
Refereed: Yes
Identification Number: https://doi.org/10.1088/1361-6595/ad0fb1

Download

Published Version

Filename: OscarEngelbrecht2023.pdf

Description: Particle-in-cell simulations of high frequency capacitively coupled plasmas including spatially localised inductive-like heating

Licence: CC-BY 2.5

CLICK TO DOWNLOAD [img]

Export

Statistics


CORE (COnnecting REpositories)