On-axis Sputtering Fabrication of Tm₃Fe₅O₁₂ Film with Perpendicular Magnetic Anisotropy

Thulium iron garnet, Tm₃Fe₅O₁₂ with perpendicular magnetic anisotropy is fabricated using an on-axis sputtering technique followed by annealing, whereas previous reports have used unusual off-axis geometries. Stoichiometric Tm₃Fe₅O₁₂ is obtained after the modification of the deposition conditions involving the position of the substrate relative to the cathode, which affects both the chemical and structural properties. The effective perpendicular magnetic anisotropy of 8.6 kJ/m³ is well in line with the results of previous studies using pulse laser deposition and off-axis sputtering. A maze domain pattern is observed, and the domain-wall energy is evaluated as 0.69 mJ/m².