A Closed-loop System for Resonant MEMS Sensors Subject to Blue-sideband Excitation

Xu, Lei, Xi, Jingqian, Gao, Lu et al. (9 more authors) (2022) A Closed-loop System for Resonant MEMS Sensors Subject to Blue-sideband Excitation. Journal of Microelectromechanical Systems. ISSN 1941-0158

Metadata

Item Type: Article
Authors/Creators:
Dates:
  • Accepted: 9 June 2022
  • Published: 22 June 2022
Institution: The University of York
Academic Units: The University of York > Faculty of Sciences (York) > Electronic Engineering (York)
Depositing User: Pure (York)
Date Deposited: 14 Jun 2022 10:10
Last Modified: 24 Apr 2024 23:20
Published Version: https://doi.org/10.1109/JMEMS.2022.3183021
Status: Published
Refereed: Yes
Identification Number: https://doi.org/10.1109/JMEMS.2022.3183021

Download

Accepted Version

Filename: SideBandExcitation_withHighlight_thirdround_.pdf

Description: SideBandExcitation_withHighlight_thirdround

CLICK TO DOWNLOAD [img]

Export

Statistics


CORE (COnnecting REpositories)