An interpretable machine learning based approach for process to areal surface metrology informatics

Obajemu, O., Mahfouf, M. orcid.org/0000-0002-7349-5396, Papananias, M. et al. (2 more authors) (2021) An interpretable machine learning based approach for process to areal surface metrology informatics. Surface Topography: Metrology and Properties, 9 (4). 044001. ISSN 2051-672X

Abstract

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Authors/Creators:
Copyright, Publisher and Additional Information: © 2021 The Author(s). Published by IOP Publishing Ltd. Original content from this work may be used under the terms of the Creative Commons Attribution 4.0 licence. (http://creativecommons.org/licenses/by/4.0) Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Keywords: fuzzy logic; manufacturing systems; industry 4.0; surface metrology
Dates:
  • Accepted: 20 September 2021
  • Published (online): 4 October 2021
  • Published: December 2021
Institution: The University of Sheffield
Academic Units: The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Automatic Control and Systems Engineering (Sheffield)
Funding Information:
FunderGrant number
ENGINEERING AND PHYSICAL SCIENCE RESEARCH COUNCILEP/P006930/1
Depositing User: Symplectic Sheffield
Date Deposited: 12 Oct 2021 09:33
Last Modified: 12 Oct 2021 09:33
Status: Published
Publisher: IOP Publishing
Refereed: Yes
Identification Number: https://doi.org/10.1088/2051-672x/ac28a7

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