Decoupling ion energy and flux in intermediate pressure capacitively coupled plasmas via tailored voltage waveforms

Doyle, Scott, Gibson, Andrew, Boswell, Rod et al. (2 more authors) (2020) Decoupling ion energy and flux in intermediate pressure capacitively coupled plasmas via tailored voltage waveforms. Plasma Sources Science and Technology. 124002. ISSN 0963-0252

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Authors/Creators:
Copyright, Publisher and Additional Information: © 2020 IOP Publishing Ltd. This is an author-produced version of the published paper. Uploaded in accordance with the publisher’s self-archiving policy.
Dates:
  • Submitted: 12 June 2020
  • Accepted: 6 November 2020
  • Published: 16 December 2020
Institution: The University of York
Academic Units: The University of York > Faculty of Sciences (York) > Physics (York)
Depositing User: Pure (York)
Date Deposited: 20 Aug 2021 10:40
Last Modified: 31 Jan 2024 01:01
Published Version: https://doi.org/10.1088/1361-6595/abc82f
Status: Published
Refereed: Yes
Identification Number: https://doi.org/10.1088/1361-6595/abc82f

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