Monitoring carbon in electron and ion beam deposition within FIB-SEM

Farr, N.T.H. orcid.org/0000-0001-6761-3600, Hughes, G.M. and Rodenburg, C. orcid.org/0000-0002-9590-375X (2021) Monitoring carbon in electron and ion beam deposition within FIB-SEM. Materials, 14 (11). 3034. ISSN 1996-1944

Abstract

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Authors/Creators:
Copyright, Publisher and Additional Information: © 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
Keywords: carbon contamination; carbon surface analysis; characterisation; focused ion beam microscopy; secondary electron emission; secondary electron hyperspectral imaging; secondary electron spectroscopy
Dates:
  • Accepted: 28 May 2021
  • Published (online): 2 June 2021
  • Published: 1 June 2021
Institution: The University of Sheffield
Academic Units: The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Materials Science and Engineering (Sheffield)
Funding Information:
FunderGrant number
ENGINEERING AND PHYSICAL SCIENCE RESEARCH COUNCILEP/N008065/1
Engineering and Physical Sciences Research CouncilEP/R00661X/1
Depositing User: Symplectic Sheffield
Date Deposited: 15 Jun 2021 10:29
Last Modified: 15 Jun 2021 10:29
Status: Published
Publisher: MDPI AG
Refereed: Yes
Identification Number: https://doi.org/10.3390/ma14113034
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