Development of phase shift lithography for the production of metal-oxide-metal diodes

Dodd, LE, Rosamond, MC, Gallant, AJ et al. (1 more author) (2014) Development of phase shift lithography for the production of metal-oxide-metal diodes. Micro and Nano Letters, 9 (7). pp. 437-440.

Abstract

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Authors/Creators:
  • Dodd, LE
  • Rosamond, MC
  • Gallant, AJ
  • Wood, D
Copyright, Publisher and Additional Information: (c) 2014, The Institution of Engineering and Technology. This paper is a postprint of a paper submitted to and accepted for publication in Micro & Nano Letters and is subject to Institution of Engineering and Technology Copyright. The copy of record is available at IET Digital Library. Uploaded in accordance with the publisher's self-archiving policy.
Dates:
  • Published: July 2014
  • Accepted: 12 May 2014
Institution: The University of Leeds
Academic Units: The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Institute of Communication & Power Networks (Leeds)
Depositing User: Symplectic Publications
Date Deposited: 30 Mar 2016 11:02
Last Modified: 24 Jan 2018 17:42
Published Version: http://dx.doi.org/10.1049/mnl.2014.0102
Status: Published
Publisher: The Institution of Engineering and Technology
Identification Number: https://doi.org/10.1049/mnl.2014.0102
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