Low-Cost Microfabrication for MEMS Switches and Varactors

Obuh, IE, Doychinov, V orcid.org/0000-0001-6730-0057, Steenson, DP et al. (3 more authors) (2018) Low-Cost Microfabrication for MEMS Switches and Varactors. IEEE Transactions on Components, Packaging and Manufacturing Technology, PP (99). pp. 1-9. ISSN 2156-3950

Abstract

Metadata

Authors/Creators:
Copyright, Publisher and Additional Information: This article is protected by copyright. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Keywords: Subtractive manufacturing, micro electromechanical systems (MEMS), rapid prototyping.
Dates:
  • Published: 5 June 2018
  • Accepted: 7 February 2018
Institution: The University of Leeds
Funding Information:
FunderGrant number
EPSRCEP/N010523/1
Depositing User: Symplectic Publications
Date Deposited: 23 Feb 2018 12:15
Last Modified: 27 Jun 2018 15:13
Status: Published
Publisher: IEEE
Identification Number: https://doi.org/10.1109/TCPMT.2018.2834865

Share / Export

Statistics