Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4

Brandt, S, Berger, B, Schüngel, E et al. (11 more authors) (2016) Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4. Plasma sources science & technology. 045015. pp. 1-17. ISSN 0963-0252

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Copyright, Publisher and Additional Information: © 2016, IOP Publishing Ltd
Dates:
  • Published: 29 June 2016
  • Accepted: 11 April 2016
Institution: The University of York
Academic Units: The University of York > Faculty of Sciences (York) > Physics (York)
Depositing User: Pure (York)
Date Deposited: 01 Aug 2016 10:13
Last Modified: 26 Apr 2020 11:02
Published Version: https://doi.org/10.1088/0963-0252/25/4/045015
Status: Published
Refereed: Yes
Identification Number: https://doi.org/10.1088/0963-0252/25/4/045015
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Description: psst_25_4_045015

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