Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas

Bruneau, Bastien, Korolov, I, Lafleur, T et al. (10 more authors) (2016) Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas. Journal of Applied Physics. 163301. 163301-1 - 163301-10. ISSN 0021-8979

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Copyright, Publisher and Additional Information: Uploaded in accordance with the publisher’s self-archiving policy. Further copying may not be permitted; contact the publisher for details
Dates:
  • Published: 26 April 2016
  • Accepted: 12 April 2016
Institution: The University of York
Academic Units: The University of York > Faculty of Sciences (York) > Physics (York)
Depositing User: Pure (York)
Date Deposited: 03 May 2016 11:08
Last Modified: 05 Jan 2020 03:51
Published Version: https://doi.org/10.1063/1.4947453
Status: Published
Refereed: Yes
Identification Number: https://doi.org/10.1063/1.4947453
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Description: Bruneau JAP 2016

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