Energy resolved actinometry for simultaneous measurement of atomic oxygen densities and local mean electron energies in radio-frequency driven plasmas

Greb, Arthur, Niemi, Kari orcid.org/0000-0001-6134-1974, O'Connell, Deborah orcid.org/0000-0002-1457-9004 et al. (1 more author) (2014) Energy resolved actinometry for simultaneous measurement of atomic oxygen densities and local mean electron energies in radio-frequency driven plasmas. Applied Physics Letters. 234105. ISSN 0003-6951

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Copyright, Publisher and Additional Information: © 2014 The Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License.
Dates:
  • Published: 11 December 2014
Institution: The University of York
Academic Units: The University of York > Faculty of Sciences (York) > Physics (York)
Depositing User: Pure (York)
Date Deposited: 09 Mar 2015 12:46
Last Modified: 31 May 2020 10:50
Published Version: https://doi.org/10.1063/1.4903931
Status: Published
Refereed: Yes
Identification Number: https://doi.org/10.1063/1.4903931

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Description: Energy resolved actinometry for simultaneous measurement of atomic oxygen densities and local mean electron energies in radio-frequency driven plasmas

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