Gas temperature measurements in a pulsed, low-pressure inductively coupled plasma in oxygen

Meehan, David, Niemi, Kari orcid.org/0000-0001-6134-1974 and Wagenaars, Erik orcid.org/0000-0002-5493-3434 (2020) Gas temperature measurements in a pulsed, low-pressure inductively coupled plasma in oxygen. Japanese Journal of Applied Physics. SHHB03. ISSN 1347-4065

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Authors/Creators:
Copyright, Publisher and Additional Information: © 2020 The Japan Society of Applied Physics
Dates:
  • Accepted: 5 February 2020
  • Published: 1 May 2020
  • Published (online): 1 May 2020
Institution: The University of York
Academic Units: The University of York > Faculty of Sciences (York) > Physics (York)
Depositing User: Pure (York)
Date Deposited: 14 Feb 2020 11:40
Last Modified: 01 Jun 2020 16:10
Published Version: https://doi.org/10.35848/1347-4065/ab7313
Status: Published
Refereed: Yes
Identification Number: https://doi.org/10.35848/1347-4065/ab7313

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