Modeling and sliding-mode control of wafer stage in lithrography machines

Dong, Y, Liu, Y, Song, F et al. (2 more authors) (2016) Modeling and sliding-mode control of wafer stage in lithrography machines. In: Proceedings of the 2016 UKACC 11th International Conference on Control (CONTROL). 2016 UKACC 11th International Conference on Control (CONTROL), 31 Aug - 02 Sep 2016, Belfast, UK. IEEE . ISBN 978-1-4673-9891-6

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Authors/Creators:
Keywords: reticle stage; 3 DOF coupling model; sliding mode control
Dates:
  • Published: 10 November 2016
  • Published (online): 10 November 2016
Institution: The University of Leeds
Academic Units: The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Institute of Communication & Power Networks (Leeds)
Depositing User: Symplectic Publications
Date Deposited: 05 Nov 2019 15:00
Last Modified: 05 Nov 2019 15:00
Status: Published
Publisher: IEEE
Identification Number: https://doi.org/10.1109/control.2016.7737578
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