3D determination of a MOSFET gate morphology by FIB tomography

Inkson, B.J. orcid.org/0000-0002-2631-9090, Olsen, S., Norris, D.J. et al. (2 more authors) (2003) 3D determination of a MOSFET gate morphology by FIB tomography. In: Cullis, A.G. and Midgley, P.A., (eds.) Microscopy of Semiconducting Materials 2003. Institute of Physics Conference 2003, 31 Mar - 03 Apr 2003, Cambridge, UK. CRC Press , pp. 611-616. ISBN 9781351074636

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Authors/Creators:
Copyright, Publisher and Additional Information: © 2003 IOP Publishing Ltd.
Dates:
  • Published (online): 10 January 2018
  • Published: 2003
Institution: The University of Sheffield
Academic Units: The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Electronic and Electrical Engineering (Sheffield)
The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Materials Science and Engineering (Sheffield)
Depositing User: Symplectic Sheffield
Date Deposited: 07 Aug 2019 14:09
Last Modified: 07 Aug 2019 14:09
Status: Published
Publisher: CRC Press
Refereed: Yes
Identification Number: https://doi.org/10.1201/9781351074636

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