3D characterisation of indentation induced sub-surface cracking in silicon nitride using FIB tomography

Baggott, A., Mazaheri, M. and Inkson, B.J. orcid.org/0000-0002-2631-9090 (2019) 3D characterisation of indentation induced sub-surface cracking in silicon nitride using FIB tomography. Journal of the European Ceramic Society, 39 (13). pp. 3620-3626. ISSN 0955-2219

Abstract

Metadata

Authors/Creators:
Copyright, Publisher and Additional Information: © 2019 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY license (http://creativecommons.org/licenses/BY/4.0/).
Keywords: Focused ion beam (FIB) tomography; Silicon nitride; Cracking; Microindentation
Dates:
  • Accepted: 10 May 2019
  • Published (online): 11 May 2019
  • Published: October 2019
Institution: The University of Sheffield
Academic Units: The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Materials Science and Engineering (Sheffield)
Depositing User: Symplectic Sheffield
Date Deposited: 09 Jul 2019 13:54
Last Modified: 10 Jul 2019 21:42
Status: Published
Publisher: Elsevier
Refereed: Yes
Identification Number: https://doi.org/10.1016/j.jeurceramsoc.2019.05.012

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