An inline surface measurement method for membrane mirror fabrication using two-stage trained Zernike polynomials and elitist teaching–learning-based optimization

Liu, Y, Chen, Z, Yang, Z et al. (2 more authors) (2016) An inline surface measurement method for membrane mirror fabrication using two-stage trained Zernike polynomials and elitist teaching–learning-based optimization. Measurement Science and Technology, 27 (12). 124005. ISSN 0957-0233

Abstract

Metadata

Authors/Creators:
  • Liu, Y
  • Chen, Z
  • Yang, Z
  • Li, K
  • Tan, J
Copyright, Publisher and Additional Information: © 2016 IOP Publishing Ltd. Original content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. To view a copy of this license, visit https://creativecommons.org/licenses/by/3.0/.
Keywords: inline measurement; forward model selection; model refinement; heuristic optimization; Zernike polynomials; non-circular region; elitist TLBO
Dates:
  • Published: December 2016
  • Accepted: 25 August 2016
  • Published (online): 19 October 2016
Institution: The University of Leeds
Academic Units: The University of Leeds > Faculty of Engineering (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Institute of Communication & Power Networks (Leeds)
Depositing User: Symplectic Publications
Date Deposited: 26 Nov 2018 10:37
Last Modified: 26 Nov 2018 10:37
Status: Published
Publisher: IOP Publishing
Identification Number: https://doi.org/10.1088/0957-0233/27/12/124005

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