MEMS Fabry-Perot interferometer based spectral sensors for industrial applications

Rissanen, A, Avila, C orcid.org/0000-0002-5691-6814, Guo, B et al. (4 more authors) (2017) MEMS Fabry-Perot interferometer based spectral sensors for industrial applications. In: Imaging and Applied Optics 2017 (3D, AIO, COSI, IS, MATH, pcAOP). Applied Industrial Optics: Spectroscopy, Imaging and Metrology 2017, 26-29 Jun 2017, San Franciso, Calif., USA. Optical Society of America . ISBN 978-1-943580-29-3

Abstract

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Authors/Creators:
Keywords: Fabry-Perot interferometer, MOEMS, microspectrometers, NIR - MIR, automotive, gas sensing
Dates:
  • Published: 26 June 2017
  • Accepted: 17 March 2017
Institution: The University of Leeds
Academic Units: The University of Leeds > Faculty of Engineering (Leeds) > School of Chemical & Process Engineering (Leeds)
Depositing User: Symplectic Publications
Date Deposited: 11 Sep 2018 16:01
Last Modified: 11 Sep 2018 16:01
Status: Published
Publisher: Optical Society of America
Identification Number: https://doi.org/10.1364/AIO.2017.ATu1A.1

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