Stehling, N.A., Masters, R., Zhou, Y. et al. (4 more authors) (2018) New perspectives on nano-engineering by secondary electron spectroscopy in the helium ion and scanning electron microscope. MRS Communications, 8 (2). pp. 226-240. ISSN 2159-6867
Abstract
The helium ion microscope (HeIM) holds immense promise for nano-engineering and imaging with scope for in-situ chemical analysis. Here we will examine the potential of Secondary Electron Hyperspectral Imaging (SEHI) as a new route to exploring chemical variations in both two and three dimensions. We present a range of early applications in the context of image interpretation in wider materials science and process control in ion beam based nano-engineering. Necessary steps for SEHI in the HeIM to evolve into a reliable technique which can be fully embedded into nano-engineering workflows are considered.
Metadata
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Copyright, Publisher and Additional Information: | © 2018 Materials Research Society. This is an author produced version of a paper subsequently published in MRS Communications. Article available under the terms of the CC-BY-NC-ND license (https://creativecommons.org/licenses/by-nc-nd/4.0/). | ||||
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Institution: | The University of Sheffield | ||||
Academic Units: | The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Materials Science and Engineering (Sheffield) | ||||
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Depositing User: | Symplectic Sheffield | ||||
Date Deposited: | 01 Mar 2018 12:18 | ||||
Last Modified: | 08 Oct 2020 09:48 | ||||
Status: | Published | ||||
Publisher: | Cambridge University Press (CUP) | ||||
Refereed: | Yes | ||||
Identification Number: | https://doi.org/10.1557/mrc.2018.75 |
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