Power coupling mode transitions induced by tailored voltage waveforms in capacitive oxygen discharges

Derzsi, Aranka, Bruneau, Bastien, Gibson, Andrew Robert orcid.org/0000-0002-1082-4359 et al. (5 more authors) (2017) Power coupling mode transitions induced by tailored voltage waveforms in capacitive oxygen discharges. Plasma sources science & technology. 034002. ISSN 0963-0252

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Authors/Creators:
Copyright, Publisher and Additional Information: © 2017 IOP Publishing Ltd
Dates:
  • Published: 7 February 2017
Institution: The University of York
Academic Units: The University of York > Faculty of Sciences (York) > Physics (York)
Depositing User: Pure (York)
Date Deposited: 16 Feb 2017 09:40
Last Modified: 26 Apr 2020 11:04
Published Version: https://doi.org/10.1088/1361-6595/aa56d6
Status: Published
Refereed: Yes
Identification Number: https://doi.org/10.1088/1361-6595/aa56d6

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