Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam

Hirohata, Atsufumi orcid.org/0000-0001-9107-2330, Yamamoto, Yasuaki, Murphy, Benedict Andrew et al. (1 more author) (2016) Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam. Nature Communications. 12701. ISSN 2041-1723

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Copyright, Publisher and Additional Information: © The Authors, 2016.
Dates:
  • Published: 2 September 2016
  • Accepted: 25 July 2016
Institution: The University of York
Academic Units: The University of York > Faculty of Sciences (York) > Electronic Engineering (York)
The University of York > Faculty of Sciences (York) > Physics (York)
Depositing User: Pure (York)
Date Deposited: 02 Sep 2016 10:42
Last Modified: 16 Jul 2019 23:18
Published Version: https://doi.org/10.1038/ncomms12701
Status: Published
Refereed: Yes
Identification Number: https://doi.org/10.1038/ncomms12701

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