Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas : comparison of Ar, H2 and CF4

Bruneau, Bastien, Lafleur, T, Gans, Timo orcid.org/0000-0003-1362-8000 et al. (13 more authors) (2016) Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas : comparison of Ar, H2 and CF4. Plasma sources science & technology. 01LT02. pp. 1-6. ISSN 0963-0252

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Copyright, Publisher and Additional Information: © 2016 IOP Publishing
Dates:
  • Published: 1 February 2016
  • Accepted: 19 October 2015
  • Published (online): 1 December 2015
Institution: The University of York
Academic Units: The University of York > Faculty of Sciences (York) > Physics (York)
Depositing User: Pure (York)
Date Deposited: 20 Jun 2016 10:13
Last Modified: 26 Apr 2020 11:00
Published Version: https://doi.org/10.1088/0963-0252/25/1/01LT02
Status: Published
Refereed: Yes
Identification Number: https://doi.org/10.1088/0963-0252/25/1/01LT02

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