Two‐inch wafer‐scale exfoliation of hexagonal boron nitride films fabricated by RF‐sputtering

Li, Q., Wang, M., Bai, Y. et al. (9 more authors) (2022) Two‐inch wafer‐scale exfoliation of hexagonal boron nitride films fabricated by RF‐sputtering. Advanced Functional Materials, 32 (38). 2206094. ISSN 1616-301X

Abstract

Metadata

Authors/Creators:
Copyright, Publisher and Additional Information: © 2022 Wiley-VCH GmbH.
Dates:
  • Published (online): 10 July 2022
  • Published: 19 September 2022
Institution: The University of Sheffield
Academic Units: The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Electronic and Electrical Engineering (Sheffield)
Funding Information:
FunderGrant number
Engineering and Physical Sciences Research CouncilEP/P006973/1; EP/W003244/1; EP/T013001/1
Depositing User: Symplectic Sheffield
Date Deposited: 12 Jul 2022 07:52
Last Modified: 03 Feb 2023 14:43
Status: Published
Publisher: Wiley
Refereed: Yes
Identification Number: https://doi.org/10.1002/adfm.202206094

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