Cai, Y., Zhu, C., Zhong, W. et al. (3 more authors) (2021) Monolithically integrated μLEDs/HEMTs microdisplay on a single chip by a direct epitaxial approach. Advanced Materials Technologies, 6 (6). 2100214. ISSN 2365-709X
Abstract
There is a significantly increasing demand on developing a microLED (μLED) based microdisplay which may be the only display system that can meet the requirements for augmented reality/virtual reality systems, helmet mounted displays, and head‐up displays. However, a number of fundamental challenges which cannot be met by any existing technologies need to be overcome before such a microdisplay with satisfied performance becomes possible. In this paper, a different type of integration concept using an epitaxial approach is proposed, aiming to monolithically integrate μLEDs and high electron mobility transistors (HEMTs) on a single chip. This concept can be potentially realized by using a selective epitaxial overgrowth method on a predefined HEMT template featuring microhole masks. Finally, the proposed epitaxial integration concept is translated into a prototype, demonstrating an 8 × 8 microLED microdisplay, where each μLED is electrically driven by an individual HEMT which surrounds its respective μLED via the gate bias of the HEMT.
Metadata
Authors/Creators: |
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Copyright, Publisher and Additional Information: | © 2021 The Authors. Advanced Materials Technologies published by Wiley‐VCH GmbH. This is an open access article under the terms of the Creative Commons Attribution License, (http://creativecommons.org/licenses/by/4.0/) which permits use, distribution and reproduction in any medium, provided the original work is properly cited. | ||||||||
Keywords: | GaN; HEMTs; microdisplay; microLEDs; selective overgrowth | ||||||||
Dates: |
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Institution: | The University of Sheffield | ||||||||
Academic Units: | The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Electronic and Electrical Engineering (Sheffield) | ||||||||
Funding Information: |
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Depositing User: | Symplectic Sheffield | ||||||||
Date Deposited: | 05 May 2021 09:50 | ||||||||
Last Modified: | 21 Feb 2022 13:52 | ||||||||
Status: | Published | ||||||||
Publisher: | Wiley | ||||||||
Refereed: | Yes | ||||||||
Identification Number: | https://doi.org/10.1002/admt.202100214 |