Ordered array of Ga droplets on GaAs(001) by local anodic oxidation

Abstract

The authors present a procedure to obtain uniform, ordered arrays of Ga droplets on GaAs(001) substrates. The growth process relies on an interplay between the substrate patterning, in form of a two dimensional array of nanoholes periodically modulated obtained via local anodic oxidation, and self-assembly of Ga droplets in a molecular beam epitaxy environment. The formation of site controlled Ga droplets, characterized by atomic force microscopy, is the outcome of the combined effects of capillary condensation and nucleation kinetics.

Metadata

Authors/Creators:	Sala, E.M. https://orcid.org/0000-0001-8116-8830 Bollani, M. Bietti, S. Fedorov, A. Esposito, L. Sanguinetti, S.
Copyright, Publisher and Additional Information:	© 2014 American Vacuum Society
Dates:	Accepted: 22 October 2014 Published (online): 4 November 2014 Published: November 2014
Institution:	The University of Sheffield
Academic Units:	The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Electronic and Electrical Engineering (Sheffield)
Depositing User:	Symplectic Sheffield
Date Deposited:	28 Nov 2019 17:03
Last Modified:	28 Nov 2019 17:03
Status:	Published
Publisher:	AIP Publishing
Refereed:	Yes
Identification Number:	https://doi.org/10.1116/1.4901017

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Ordered array of Ga droplets on GaAs(001) by local anodic oxidation

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