Failure mechanism and protective role of ultrathin ta-C films on Si (100) during cyclic nano-impact

Shi, X, Beake, BD, Liskiewicz, TW orcid.org/0000-0002-0866-814X et al. (2 more authors) (2019) Failure mechanism and protective role of ultrathin ta-C films on Si (100) during cyclic nano-impact. Surface and Coatings Technology, 364. pp. 32-42. ISSN 0257-8972

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Copyright, Publisher and Additional Information: © 2019 Published by Elsevier B.V. This is an author produced version of a paper published in Surface and Coatings Technology. Uploaded in accordance with the publisher's self-archiving policy.
Keywords: Nano-impact; Tetrahedral amorphous carbon; Ultrathin films; Silicon; Failure mechanism
Dates:
  • Accepted: 25 February 2019
  • Published (online): 26 February 2019
  • Published: 25 April 2019
Institution: The University of Leeds
Academic Units: The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Mechanical Engineering (Leeds) > Institute of Functional Surfaces (Leeds)
Depositing User: Symplectic Publications
Date Deposited: 26 Apr 2019 10:59
Last Modified: 26 Feb 2020 01:38
Status: Published
Publisher: Elsevier
Identification Number: https://doi.org/10.1016/j.surfcoat.2019.02.082
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