Characterization of a Miniature Electron Energy Analyzer for Scanning Electron Microscopes

Abstract

We report the design and experimental characterisation of a miniature detector for the scanning electron microscope based on the Bessel Box (BB) electron energy analyser which has a simple cylindrical geometry. We report on the simulation and operation of a prototype BB. The energy resolution of a single BB has been numerically calculated and experimentally characterised to be < 1%. This miniature electron detector is designed to be used close to the sample, alleviating the effects of the ambient electrostatic and magnetic fields.

Metadata

Authors/Creators:	Suri, Ashish (as2268@york.ac.uk) Pratt, Andrew https://orcid.org/0000-0002-0795-2640 Tear, Steven Philip https://orcid.org/0000-0002-1535-1327 Walker, Christopher George Havelock (christopher.walker@york.ac.uk) El Gomati, Mohamed M https://orcid.org/0000-0002-7782-6965
Dates:	Published: September 2017
Institution:	The University of York
Academic Units:	The University of York > Faculty of Sciences (York) > Physics (York) The University of York > Faculty of Sciences (York) > Electronic Engineering (York)
Depositing User:	Pure (York)
Date Deposited:	23 Nov 2017 14:30
Last Modified:	05 Feb 2024 00:29
Published Version:	https://doi.org/10.1088/1742-6596/902/1/012017
Status:	Published
Refereed:	Yes
Identification Number:	https://doi.org/10.1088/1742-6596/902/1/012017

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Filename: Suri_2017_J._Phys._3A_Conf._Ser._902_012017.pdf

Description: Characterization of a Miniature Electron Energy Analyzer for Scanning Electron Microscopes

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Characterization of a Miniature Electron Energy Analyzer for Scanning Electron Microscopes

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