Doyle, Scott James, Lafleur, Trevor, Gibson, Andrew Robert orcid.org/0000-0002-1082-4359 et al. (3 more authors) (2017) Enhanced control of the ionization rate in radio-frequency plasmas with structured electrodes via tailored voltage waveforms. Plasma sources science & technology. ISSN 0963-0252
Metadata
Authors/Creators: |
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Copyright, Publisher and Additional Information: | © IOP Publishing 2017. This is an author-produced version of the published paper. Uploaded in accordance with the publisher’s self-archiving policy. Further copying may not be permitted; contact the publisher for details |
Dates: |
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Institution: | The University of York |
Academic Units: | The University of York > Faculty of Sciences (York) > Physics (York) |
Depositing User: | Pure (York) |
Date Deposited: | 13 Nov 2017 09:20 |
Last Modified: | 06 Jan 2024 00:30 |
Published Version: | https://doi.org/10.1088/1361-6595/aa96e5 |
Status: | Published |
Refereed: | Yes |
Identification Number: | https://doi.org/10.1088/1361-6595/aa96e5 |