Effects of Substrate Bias on Tribological Properties of Diamondlike Carbon Thin Films Deposited Via Microwave-Excited Plasma-Enhanced Chemical Vapor Deposition

Win Khun, N, Neville, A, Kolev, I et al. (1 more author) (2016) Effects of Substrate Bias on Tribological Properties of Diamondlike Carbon Thin Films Deposited Via Microwave-Excited Plasma-Enhanced Chemical Vapor Deposition. Journal of Tribology, 138 (3). 031301. ISSN 0742-4787

Abstract

Metadata

Authors/Creators:
  • Win Khun, N
  • Neville, A
  • Kolev, I
  • Zhao, H
Keywords: DLC film, microwave-excited plasma-enhanced CVD, substrate bias, friction, wear
Dates:
  • Accepted: 23 October 2015
  • Published (online): 15 February 2016
  • Published: July 2016
Institution: The University of Leeds
Academic Units: The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Mechanical Engineering (Leeds) > Institute of Functional Surfaces (Leeds)
Depositing User: Symplectic Publications
Date Deposited: 23 Jun 2016 08:33
Last Modified: 03 Nov 2016 09:35
Published Version: http://dx.doi.org/10.1115/1.4031995
Status: Published
Publisher: American Society of Mechanical Engineers
Identification Number: https://doi.org/10.1115/1.4031995

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