A manufacturable miniature electron beam column

Spallas, J.P., Silver, C.S., Muray, L.P. et al. (2 more authors) (2006) A manufacturable miniature electron beam column. Microelectronic Engineering Micro- and Nano-Engineering MNE, 83 (4-9). pp. 984-989. ISSN 0167-9317



  • Spallas, J.P.
  • Silver, C.S.
  • Muray, L.P.
  • Wells, T.
  • El-Gomati, M.
  • Published: September 2006
Institution: The University of York
Academic Units: The University of York > Faculty of Sciences (York) > Electronic Engineering (York)
Depositing User: York RAE Import
Date Deposited: 27 Mar 2009 15:13
Last Modified: 27 Mar 2009 15:13
Published Version: http://dx.doi.org/10.1016/j.mee.2006.01.245
Status: Published
Publisher: Elsevier
Identification Number: https://doi.org/10.1016/j.mee.2006.01.245

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