A comparison of two multilayer microcoil fabrication techiques

Hartley, A.C., Miles, R.E. and Corda, J. (2004) A comparison of two multilayer microcoil fabrication techiques. In: Device and Process Technologies for MEMS, Microelectronics, and Photonics. Device and Process Technologies for MEMS, Microelectronics, and Photonics III, Wednesday 10 December 2003, Perth, Australia. Proceedings of SPIE (5276). SPIE , pp. 154-161.

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Authors/Creators:
  • Hartley, A.C.
  • Miles, R.E. (r.e.miles@leeds.ac.uk)
  • Corda, J. (j.corda@leeds.ac.uk)
Copyright, Publisher and Additional Information: This paper was published in Proceedings of SPIE and is made available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Keywords: multilayer, fabrication techniques
Institution: The University of Leeds
Academic Units: The University of Leeds > Faculty of Engineering (Leeds) > School of Electronic & Electrical Engineering (Leeds)
Depositing User: Mrs Marie Barber
Date Deposited: 08 Dec 2008 18:27
Last Modified: 27 Oct 2016 21:18
Published Version: http://dx.doi.org/10.1117/12.522929
Status: Published
Publisher: SPIE
Refereed: Yes
Identification Number: https://doi.org/10.1117/12.522929

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