Thermodynamic processes on a semiconductor surface during in-situ multi-beam laser interference patterning

Wang, Y.R., Jin, C.Y., Ho, C.H. et al. (3 more authors) (2019) Thermodynamic processes on a semiconductor surface during in-situ multi-beam laser interference patterning. In: IET Optoelectronics. Semiconductor and Integrated Optoelectronics (SIOE) 2018, 27-29 Mar 2018, Cardiff, United Kingdom. Institution of Engineering and Technology , pp. 7-11.

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Authors/Creators:
Copyright, Publisher and Additional Information: © The Institution of Engineering and Technology 2018. This is an author produced version of a paper subsequently published in IET Optoelectronics. Uploaded in accordance with the publisher's self-archiving policy.
Dates:
  • Accepted: 15 October 2018
  • Published (online): 12 November 2018
  • Published: 25 February 2019
Institution: The University of Sheffield
Academic Units: The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Electronic and Electrical Engineering (Sheffield)
Funding Information:
FunderGrant number
ENGINEERING AND PHYSICAL SCIENCE RESEARCH COUNCIL (EPSRC)EP/P027822/1
EUROPEAN COMMISSION - HORIZON 2020767285
Depositing User: Symplectic Sheffield
Date Deposited: 08 Mar 2019 13:48
Last Modified: 11 Mar 2019 09:08
Published Version: https://doi.org/10.1049/iet-opt.2018.5028
Status: Published
Publisher: Institution of Engineering and Technology
Refereed: Yes
Identification Number: https://doi.org/10.1049/iet-opt.2018.5028

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