Controlling plasma properties under differing degrees of electronegativity using odd harmonic dual frequency excitation

Gibson, Andrew Robert orcid.org/0000-0002-1082-4359 and Gans, Timo orcid.org/0000-0003-1362-8000 (2017) Controlling plasma properties under differing degrees of electronegativity using odd harmonic dual frequency excitation. Plasma sources science & technology. 115007. ISSN 0963-0252

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Authors/Creators:
Copyright, Publisher and Additional Information: © 2017 IOP Publishing Ltd.
Dates:
  • Accepted: 20 September 2017
  • Published (online): 20 September 2017
  • Published: 24 October 2017
Institution: The University of York
Academic Units: The University of York > Faculty of Sciences (York) > Physics (York)
Depositing User: Pure (York)
Date Deposited: 18 Oct 2017 13:45
Last Modified: 06 Dec 2023 12:06
Published Version: https://doi.org/10.1088/1361-6595/aa8dcd
Status: Published
Refereed: Yes
Identification Number: https://doi.org/10.1088/1361-6595/aa8dcd

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