Pettinari, G., Gerardino, A., Businaro, L. et al. (9 more authors) (2017) A lithographic approach for quantum dot-photonic crystal nanocavity coupling in dilute nitrides. Microelectronic Engineering, 174. pp. 16-19. ISSN 0167-9317
Abstract
We report on a novel lithographic approach for the fabrication of integrated quantum dot (QD)-photonic crystal (PhC) nanocavity systems. We exploit unique hydrogen's ability to tailor the band gap energy of dilute nitride semiconductors to fabricate isolated site-controlled QDs via a spatially selective hydrogenation at the nanometer-scale. A deterministic integration of the realized site-controlled QDs with PhC nanocavities is provided by the inherent realignment precision (~ 20 nm) of the electron beam lithography system used for the fabrication of both QDs and PhC cavities. A detailed description of the fabrication steps leading to the realization of integrated QD-PhC cavity systems is provided, together with the experimental evidence of a weak coupling effect between the single-photon emitter and the PhC cavity.
Metadata
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Copyright, Publisher and Additional Information: | © 2016 Elsevier. This is an author produced version of a paper subsequently published in Microelectronic Engineering . Uploaded in accordance with the publisher's self-archiving policy. Article available under the terms of the CC-BY-NC-ND licence (https://creativecommons.org/licenses/by-nc-nd/4.0/) | ||||
Keywords: | Site-controlled QDs; Photonic crystal structures; Dilute nitrides; Hydrogen in semiconductors | ||||
Dates: |
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Institution: | The University of Sheffield | ||||
Academic Units: | The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Electronic and Electrical Engineering (Sheffield) | ||||
Funding Information: |
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Depositing User: | Symplectic Sheffield | ||||
Date Deposited: | 02 Feb 2017 12:53 | ||||
Last Modified: | 16 Dec 2017 01:38 | ||||
Published Version: | https://doi.org/10.1016/j.mee.2016.12.003 | ||||
Status: | Published | ||||
Publisher: | Elsevier | ||||
Refereed: | Yes | ||||
Identification Number: | https://doi.org/10.1016/j.mee.2016.12.003 |