Non-contact online thickness measurement system for metal films based on eddy current sensing with distance tracking technique

Li, W, Wang, H and Feng, Z (2016) Non-contact online thickness measurement system for metal films based on eddy current sensing with distance tracking technique. Review of Scientific Instruments, 87 (4). 045005. 045005-045005. ISSN 0034-6748

Abstract

Metadata

Authors/Creators:
  • Li, W
  • Wang, H
  • Feng, Z
Copyright, Publisher and Additional Information: © 2016, American Institute of Physics. This is the published version of a paper published in Review of Scientific Instruments. Reproduced and uploaded in accordance with the publisher's self-archiving policy.
Keywords: Thickness measurement; Eddy current sensors; non-contact measurement; mental films; conductivity
Dates:
  • Accepted: 8 April 2016
  • Published (online): 21 April 2016
  • Published: 21 April 2016
Institution: The University of Leeds
Academic Units: The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Mechanical Engineering (Leeds) > Institute of Functional Surfaces (Leeds)
Depositing User: Symplectic Publications
Date Deposited: 26 May 2016 15:03
Last Modified: 22 Apr 2017 00:38
Published Version: http://dx.doi.org/10.1063/1.4947234
Status: Published
Publisher: American Institute of Physics
Identification Number: https://doi.org/10.1063/1.4947234

Export

Statistics